6/21/2012	12:02:21 AM	Helium valve closed
6/21/2012	12:02:21 AM	H2 valve closed
6/21/2012	12:02:21 AM	BCl3 valve closed
6/21/2012	12:02:21 AM	PH3 valve closed
6/21/2012	12:02:21 AM	SiCl4 pre valve closed
6/21/2012	12:02:21 AM	SiCl4 post valve closed
6/21/2012	12:02:21 AM	Main Vac valve closed
6/21/2012	12:02:21 AM	Bypass valve closed
6/21/2012	12:02:21 AM	Bubbler valve closed
6/21/2012	12:02:21 AM	Helium MFC set to  0.000000
6/21/2012	12:02:21 AM	H2 MFC set to  0.000000
6/21/2012	12:02:21 AM	BCl3 MFC set to  0.000000
6/21/2012	12:02:21 AM	PH3 MFC set to  0.000000
6/21/2012	12:02:21 AM	SiCl4 MFC set to  0.000000
6/21/2012	12:02:21 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	12:02:21 AM	Tube furnace set to 0
6/21/2012	12:02:24 AM	Helium valve closed
6/21/2012	12:02:24 AM	BCl3 valve closed
6/21/2012	12:02:24 AM	PH3 valve closed
6/21/2012	12:02:24 AM	SiCl4 pre valve closed
6/21/2012	12:02:24 AM	SiCl4 post valve closed
6/21/2012	12:02:24 AM	Main Vac valve closed
6/21/2012	12:02:24 AM	Bypass valve closed
6/21/2012	12:02:24 AM	Bubbler valve closed
6/21/2012	12:02:24 AM	H2 valve opened
6/21/2012	12:02:24 AM	Helium MFC set to  0.000000
6/21/2012	12:02:24 AM	H2 MFC set to  500.000000
6/21/2012	12:02:24 AM	BCl3 MFC set to  0.000000
6/21/2012	12:02:24 AM	PH3 MFC set to  0.000000
6/21/2012	12:02:24 AM	SiCl4 MFC set to  0.000000
6/21/2012	12:02:24 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	12:02:24 AM	Tube furnace set to 0
6/21/2012	12:03:38 AM	Helium valve closed
6/21/2012	12:03:38 AM	BCl3 valve closed
6/21/2012	12:03:38 AM	PH3 valve closed
6/21/2012	12:03:38 AM	SiCl4 pre valve closed
6/21/2012	12:03:38 AM	SiCl4 post valve closed
6/21/2012	12:03:38 AM	Main Vac valve closed
6/21/2012	12:03:38 AM	Bypass valve closed
6/21/2012	12:03:38 AM	H2 valve opened
6/21/2012	12:03:38 AM	Bubbler valve opened
6/21/2012	12:03:38 AM	Helium MFC set to  0.000000
6/21/2012	12:03:38 AM	H2 MFC set to  500.000000
6/21/2012	12:03:38 AM	BCl3 MFC set to  0.000000
6/21/2012	12:03:39 AM	PH3 MFC set to  0.000000
6/21/2012	12:03:39 AM	SiCl4 MFC set to  0.000000
6/21/2012	12:03:39 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	12:03:39 AM	Tube furnace set to 0
6/21/2012	12:03:40 AM	Helium valve closed
6/21/2012	12:03:40 AM	BCl3 valve closed
6/21/2012	12:03:40 AM	PH3 valve closed
6/21/2012	12:03:40 AM	SiCl4 pre valve closed
6/21/2012	12:03:40 AM	SiCl4 post valve closed
6/21/2012	12:03:40 AM	Main Vac valve closed
6/21/2012	12:03:40 AM	Bypass valve closed
6/21/2012	12:03:40 AM	H2 valve opened
6/21/2012	12:03:40 AM	Bubbler valve opened
6/21/2012	12:03:40 AM	Helium MFC set to  0.000000
6/21/2012	12:03:40 AM	H2 MFC set to  500.000000
6/21/2012	12:03:40 AM	BCl3 MFC set to  0.000000
6/21/2012	12:03:40 AM	PH3 MFC set to  0.000000
6/21/2012	12:03:40 AM	SiCl4 MFC set to  0.000000
6/21/2012	12:03:40 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	12:03:40 AM	Tube furnace set to 1000
6/21/2012	12:28:40 AM	Helium valve closed
6/21/2012	12:28:40 AM	PH3 valve closed
6/21/2012	12:28:40 AM	Main Vac valve closed
6/21/2012	12:28:40 AM	Bypass valve closed
6/21/2012	12:28:40 AM	H2 valve opened
6/21/2012	12:28:40 AM	BCl3 valve opened
6/21/2012	12:28:40 AM	SiCl4 pre valve opened
6/21/2012	12:28:40 AM	SiCl4 post valve opened
6/21/2012	12:28:40 AM	Bubbler valve opened
6/21/2012	12:28:40 AM	Helium MFC set to  0.000000
6/21/2012	12:28:40 AM	H2 MFC set to  450.000000
6/21/2012	12:28:40 AM	BCl3 MFC set to  1.000000
6/21/2012	12:28:40 AM	PH3 MFC set to  0.000000
6/21/2012	12:28:40 AM	SiCl4 MFC set to  50.000000
6/21/2012	12:28:40 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	12:28:40 AM	Tube furnace set to 1000
6/21/2012	12:45:40 AM	Helium valve closed
6/21/2012	12:45:40 AM	BCl3 valve closed
6/21/2012	12:45:40 AM	Main Vac valve closed
6/21/2012	12:45:40 AM	Bypass valve closed
6/21/2012	12:45:40 AM	H2 valve opened
6/21/2012	12:45:40 AM	PH3 valve opened
6/21/2012	12:45:40 AM	SiCl4 pre valve opened
6/21/2012	12:45:40 AM	SiCl4 post valve opened
6/21/2012	12:45:40 AM	Bubbler valve opened
6/21/2012	12:45:40 AM	Helium MFC set to  0.000000
6/21/2012	12:45:40 AM	H2 MFC set to  430.000000
6/21/2012	12:45:40 AM	BCl3 MFC set to  0.000000
6/21/2012	12:45:40 AM	PH3 MFC set to  20.000000
6/21/2012	12:45:40 AM	SiCl4 MFC set to  50.000000
6/21/2012	12:45:40 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	12:45:40 AM	Tube furnace set to 1000
6/21/2012	1:02:40 AM	Helium valve closed
6/21/2012	1:02:40 AM	BCl3 valve closed
6/21/2012	1:02:40 AM	PH3 valve closed
6/21/2012	1:02:40 AM	SiCl4 pre valve closed
6/21/2012	1:02:40 AM	SiCl4 post valve closed
6/21/2012	1:02:40 AM	Main Vac valve closed
6/21/2012	1:02:40 AM	Bypass valve closed
6/21/2012	1:02:40 AM	H2 valve opened
6/21/2012	1:02:40 AM	Bubbler valve opened
6/21/2012	1:02:40 AM	Helium MFC set to  0.000000
6/21/2012	1:02:40 AM	H2 MFC set to  500.000000
6/21/2012	1:02:40 AM	BCl3 MFC set to  0.000000
6/21/2012	1:02:40 AM	PH3 MFC set to  0.000000
6/21/2012	1:02:40 AM	SiCl4 MFC set to  0.000000
6/21/2012	1:02:40 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	1:02:40 AM	Tube furnace set to 750
6/21/2012	1:17:40 AM	H2 valve closed
6/21/2012	1:17:40 AM	BCl3 valve closed
6/21/2012	1:17:40 AM	PH3 valve closed
6/21/2012	1:17:40 AM	SiCl4 pre valve closed
6/21/2012	1:17:40 AM	SiCl4 post valve closed
6/21/2012	1:17:40 AM	Main Vac valve closed
6/21/2012	1:17:40 AM	Bypass valve closed
6/21/2012	1:17:40 AM	Helium valve opened
6/21/2012	1:17:40 AM	Bubbler valve opened
6/21/2012	1:17:40 AM	Helium MFC set to  500.000000
6/21/2012	1:17:40 AM	H2 MFC set to  0.000000
6/21/2012	1:17:41 AM	BCl3 MFC set to  0.000000
6/21/2012	1:17:41 AM	PH3 MFC set to  0.000000
6/21/2012	1:17:41 AM	SiCl4 MFC set to  0.000000
6/21/2012	1:17:41 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	1:17:41 AM	Tube furnace set to 0
6/21/2012	1:37:41 AM	Helium valve closed
6/21/2012	1:37:41 AM	H2 valve closed
6/21/2012	1:37:41 AM	BCl3 valve closed
6/21/2012	1:37:41 AM	PH3 valve closed
6/21/2012	1:37:41 AM	SiCl4 pre valve closed
6/21/2012	1:37:41 AM	SiCl4 post valve closed
6/21/2012	1:37:41 AM	Main Vac valve closed
6/21/2012	1:37:41 AM	Bypass valve closed
6/21/2012	1:37:41 AM	Bubbler valve closed
6/21/2012	1:37:41 AM	Helium MFC set to  0.000000
6/21/2012	1:37:41 AM	H2 MFC set to  0.000000
6/21/2012	1:37:41 AM	BCl3 MFC set to  0.000000
6/21/2012	1:37:41 AM	PH3 MFC set to  0.000000
6/21/2012	1:37:41 AM	SiCl4 MFC set to  0.000000
6/21/2012	1:37:41 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	1:37:41 AM	Tube furnace set to 0
6/21/2012	1:57:41 AM	Helium valve closed
6/21/2012	1:57:41 AM	H2 valve closed
6/21/2012	1:57:41 AM	BCl3 valve closed
6/21/2012	1:57:41 AM	PH3 valve closed
6/21/2012	1:57:41 AM	SiCl4 pre valve closed
6/21/2012	1:57:41 AM	SiCl4 post valve closed
6/21/2012	1:57:41 AM	Main Vac valve closed
6/21/2012	1:57:41 AM	Bubbler valve closed
6/21/2012	1:57:41 AM	Bypass valve opened
6/21/2012	1:57:41 AM	Helium MFC set to  0.000000
6/21/2012	1:57:41 AM	H2 MFC set to  0.000000
6/21/2012	1:57:41 AM	BCl3 MFC set to  0.000000
6/21/2012	1:57:41 AM	PH3 MFC set to  0.000000
6/21/2012	1:57:41 AM	SiCl4 MFC set to  0.000000
6/21/2012	1:57:41 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	1:57:41 AM	Tube furnace set to 0
6/21/2012	1:58:32 AM	Helium valve closed
6/21/2012	1:58:32 AM	H2 valve closed
6/21/2012	1:58:32 AM	BCl3 valve closed
6/21/2012	1:58:32 AM	PH3 valve closed
6/21/2012	1:58:32 AM	SiCl4 pre valve closed
6/21/2012	1:58:32 AM	SiCl4 post valve closed
6/21/2012	1:58:32 AM	Main Vac valve closed
6/21/2012	1:58:32 AM	Bubbler valve closed
6/21/2012	1:58:32 AM	Bypass valve opened
6/21/2012	1:58:32 AM	Helium MFC set to  0.000000
6/21/2012	1:58:32 AM	H2 MFC set to  0.000000
6/21/2012	1:58:32 AM	BCl3 MFC set to  0.000000
6/21/2012	1:58:32 AM	PH3 MFC set to  0.000000
6/21/2012	1:58:32 AM	SiCl4 MFC set to  0.000000
6/21/2012	1:58:32 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	1:58:32 AM	Tube furnace set to 0
6/21/2012	1:59:32 AM	Helium valve closed
6/21/2012	1:59:32 AM	H2 valve closed
6/21/2012	1:59:32 AM	BCl3 valve closed
6/21/2012	1:59:32 AM	PH3 valve closed
6/21/2012	1:59:32 AM	SiCl4 pre valve closed
6/21/2012	1:59:32 AM	SiCl4 post valve closed
6/21/2012	1:59:32 AM	Bypass valve closed
6/21/2012	1:59:32 AM	Bubbler valve closed
6/21/2012	1:59:32 AM	Main Vac valve opened
6/21/2012	1:59:32 AM	Helium MFC set to  0.000000
6/21/2012	1:59:32 AM	H2 MFC set to  0.000000
6/21/2012	1:59:32 AM	BCl3 MFC set to  0.000000
6/21/2012	1:59:32 AM	PH3 MFC set to  0.000000
6/21/2012	1:59:32 AM	SiCl4 MFC set to  0.000000
6/21/2012	1:59:32 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	1:59:32 AM	Tube furnace set to 0
6/21/2012	2:59:32 AM	Run finished at 2:59 AM
6/21/2012	8:38:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2012	8:38:12 AM	Recipe started at 8:38 AM
6/21/2012	8:38:12 AM	Helium valve closed
6/21/2012	8:38:12 AM	H2 valve closed
6/21/2012	8:38:12 AM	BCl3 valve closed
6/21/2012	8:38:12 AM	PH3 valve closed
6/21/2012	8:38:12 AM	SiCl4 pre valve closed
6/21/2012	8:38:12 AM	SiCl4 post valve closed
6/21/2012	8:38:12 AM	Main Vac valve closed
6/21/2012	8:38:12 AM	Bypass valve closed
6/21/2012	8:38:12 AM	Bubbler valve closed
6/21/2012	8:38:12 AM	Helium MFC set to  0.000000
6/21/2012	8:38:12 AM	H2 MFC set to  0.000000
6/21/2012	8:38:12 AM	BCl3 MFC set to  0.000000
6/21/2012	8:38:12 AM	PH3 MFC set to  0.000000
6/21/2012	8:38:12 AM	SiCl4 MFC set to  0.000000
6/21/2012	8:38:12 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	8:38:12 AM	Tube furnace set to 0
6/21/2012	8:38:15 AM	H2 valve closed
6/21/2012	8:38:15 AM	BCl3 valve closed
6/21/2012	8:38:15 AM	PH3 valve closed
6/21/2012	8:38:15 AM	SiCl4 pre valve closed
6/21/2012	8:38:15 AM	SiCl4 post valve closed
6/21/2012	8:38:15 AM	Main Vac valve closed
6/21/2012	8:38:15 AM	Bypass valve closed
6/21/2012	8:38:15 AM	Bubbler valve closed
6/21/2012	8:38:15 AM	Helium valve opened
6/21/2012	8:38:15 AM	Helium MFC set to  500.000000
6/21/2012	8:38:15 AM	H2 MFC set to  0.000000
6/21/2012	8:38:15 AM	BCl3 MFC set to  0.000000
6/21/2012	8:38:15 AM	PH3 MFC set to  0.000000
6/21/2012	8:38:15 AM	SiCl4 MFC set to  0.000000
6/21/2012	8:38:15 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	8:38:16 AM	Tube furnace set to 0
6/21/2012	8:39:28 AM	Helium valve closed
6/21/2012	8:39:28 AM	H2 valve closed
6/21/2012	8:39:28 AM	BCl3 valve closed
6/21/2012	8:39:28 AM	PH3 valve closed
6/21/2012	8:39:28 AM	SiCl4 pre valve closed
6/21/2012	8:39:28 AM	SiCl4 post valve closed
6/21/2012	8:39:28 AM	Main Vac valve closed
6/21/2012	8:39:28 AM	Bypass valve closed
6/21/2012	8:39:28 AM	Bubbler valve closed
6/21/2012	8:39:28 AM	Helium MFC set to  0.000000
6/21/2012	8:39:28 AM	H2 MFC set to  0.000000
6/21/2012	8:39:28 AM	BCl3 MFC set to  0.000000
6/21/2012	8:39:28 AM	PH3 MFC set to  0.000000
6/21/2012	8:39:28 AM	SiCl4 MFC set to  0.000000
6/21/2012	8:39:28 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	8:39:28 AM	Tube furnace set to 0
6/21/2012	8:39:29 AM	Run finished at 8:39 AM
6/21/2012	8:39:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/21/2012	8:42:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/21/2012	8:43:00 AM	Recipe started at 8:42 AM
6/21/2012	8:43:00 AM	Helium valve closed
6/21/2012	8:43:00 AM	H2 valve closed
6/21/2012	8:43:00 AM	BCl3 valve closed
6/21/2012	8:43:00 AM	PH3 valve closed
6/21/2012	8:43:00 AM	SiCl4 pre valve closed
6/21/2012	8:43:00 AM	SiCl4 post valve closed
6/21/2012	8:43:00 AM	Main Vac valve closed
6/21/2012	8:43:00 AM	Bubbler valve closed
6/21/2012	8:43:00 AM	Bypass valve opened
6/21/2012	8:43:00 AM	Helium MFC set to  0.000000
6/21/2012	8:43:00 AM	H2 MFC set to  0.000000
6/21/2012	8:43:00 AM	BCl3 MFC set to  0.000000
6/21/2012	8:43:00 AM	PH3 MFC set to  0.000000
6/21/2012	8:43:00 AM	SiCl4 MFC set to  0.000000
6/21/2012	8:43:00 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	8:43:00 AM	Tube furnace set to 0
6/21/2012	8:44:06 AM	Helium valve closed
6/21/2012	8:44:06 AM	H2 valve closed
6/21/2012	8:44:06 AM	BCl3 valve closed
6/21/2012	8:44:06 AM	PH3 valve closed
6/21/2012	8:44:06 AM	SiCl4 pre valve closed
6/21/2012	8:44:06 AM	SiCl4 post valve closed
6/21/2012	8:44:06 AM	Main Vac valve closed
6/21/2012	8:44:06 AM	Bubbler valve closed
6/21/2012	8:44:06 AM	Bypass valve opened
6/21/2012	8:44:06 AM	Helium MFC set to  0.000000
6/21/2012	8:44:06 AM	H2 MFC set to  0.000000
6/21/2012	8:44:06 AM	BCl3 MFC set to  0.000000
6/21/2012	8:44:06 AM	PH3 MFC set to  0.000000
6/21/2012	8:44:06 AM	SiCl4 MFC set to  0.000000
6/21/2012	8:44:06 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	8:44:06 AM	Tube furnace set to 0
6/21/2012	8:45:06 AM	Helium valve closed
6/21/2012	8:45:06 AM	H2 valve closed
6/21/2012	8:45:06 AM	BCl3 valve closed
6/21/2012	8:45:06 AM	PH3 valve closed
6/21/2012	8:45:06 AM	SiCl4 pre valve closed
6/21/2012	8:45:06 AM	SiCl4 post valve closed
6/21/2012	8:45:06 AM	Bypass valve closed
6/21/2012	8:45:06 AM	Bubbler valve closed
6/21/2012	8:45:06 AM	Main Vac valve opened
6/21/2012	8:45:06 AM	Helium MFC set to  0.000000
6/21/2012	8:45:06 AM	H2 MFC set to  0.000000
6/21/2012	8:45:06 AM	BCl3 MFC set to  0.000000
6/21/2012	8:45:06 AM	PH3 MFC set to  0.000000
6/21/2012	8:45:06 AM	SiCl4 MFC set to  0.000000
6/21/2012	8:45:06 AM	Bypass solenoid MFC set to  0.000000
6/21/2012	8:45:06 AM	Tube furnace set to 0
6/21/2012	8:45:07 AM	Run finished at 8:45 AM
6/21/2012	8:45:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
